NEXIV VMZ-H3030 – Through the Lens (TTL) Laser

Offering advanced usability and performance, the NEXIX VMZ-H3030 achieves the highest accuracy within Nikon's NEXIV series.

VMZ-H3030 sets the Standard when High Accuracy is Critical

VMZ-H3030 provides a 300x300x150 mm (X,Y,Z) measuring envelope together with a range of high quality optics, complete with a TTL (through-the-lens) scanning laser as standard. The system is designed to provide the ultimate in high accuracy measurement.

Highest Accuracy using the NEXIV Series Due to its unique design and construction, the VMZ-H achieves the highest accuracy within the NEXIV series.


Product Highlights


5 Types of Optical Zoom System

5 types of optical zoom system are available to cover different field-of-view and resolution requirements.


High-Speed Height Measurement

Highly precise, high-speed height measurement is made possible by the accurate through-the-lens laser autofocus, which is capable of high-speed scanning at 1,000 points per second.

Ability to Measure Difficult Samples

Difficult edges and features can be easily measured using Nikon’s unique illumination options.

Non-Stop Automatic Measurement

Accurate measurement can be achieved despite variation in component positioning.

Core Features


Remote Control SDK

XYZ Strokes300x300x150 mm
Minimum Readout0.01 μm
Maximum Sample Weight30 kg (Accuracy Guaranteed: 10 kg)
Maximum Permissible Error
(for samples under 20 kg)
EUX,MPE EUY,MPE: 0.6+2L /1000 μm
EUXY,MPE: 0.9+3L /1000 μm
EUZ,MPE: 0.9+L /150 μm
Accuracy Guaranteed Temperature20 °C ± 0.5 K
Maximum Driving Speed XY, Z100 mm/s, 50 mm/s
Minimum Driving Speed XY, Z0.01 mm/s, 0.001 mm/s
CameraVGA 1/3" B/W, Color *Color camera option is available only with Type 1, 2 and 3.
Working DistanceType 1, 2, 3: 50 mm (10 mm when using 75 degree LED illumination) /
Type 4: 30 mm
Type TZ: 31 mm (low magnification), 11 mm (high magnification)
AutofocusVision AF, Laser AF
Power SourceAC 100 - 240 V ± 10% 50/60 Hz
Power Consumption5A - 2.5 A
Dimensions (WxDxH) and WeightMain body with table: 1000 x 1125 x 1750 mm / approx. 500 kg
Controller: 190 x 450 x 440 mm / approx. 15 kg"
Footprint (WxD)3000×2800 mm
Type 1, 2, 3, and 4Episcopic, diascopic, and 8-segment ring with 3 angles *All white LED/Type 4 has only 1 angle
Type TZEpiscopic, diascopic, darkfield
Power SourceAC 100 - 240 V u00b1 10% 50/60 Hz
Power Consumption5 A - 2.5 A
Zooming HeadOptical MagnificationFOVApplications
Type 1 0.5X - 7.5X9.33u00d77.01~0.622u00d70.467 mmMolds, mechanical parts (household, automotive), PCB, electronic parts
Type 2 1X - 15X
4.67u00d73.5~0.311u00d70.233 mm
Type 3 2X - 30X2.33u00d71.75~0.155u00d70.117 mmElectronic parts
Type 4 4X - 60X1.165u00d70.875~0.078u00d70.058 mmHigh density package substrate (line, width, height)
Type TZ 1X - 120X4.67u00d73.5~0.039u00d70.029 mm Wafer pattern (WLP, bump height, rewiring mask, MEMS mask)

5 types of Optical Zoom Systems. Type 1, 2, and 3 provide clear and low distortion image and high N. Type 4 and TZ are designed to cover high magnification, 5 types are available to choose from to cover different fields of view and resolution requirements.


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