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VMZ-H3030 sets the Standard when High Accuracy is Critical
VMZ-H3030 provides a 300x300x150 mm (X,Y,Z) measuring envelope together with a range of high quality optics, complete with a TTL (through-the-lens) scanning laser as standard. The system is designed to provide the ultimate in high accuracy measurement.
Highest Accuracy using the NEXIV Series Due to its unique design and construction, the VMZ-H achieves the highest accuracy within the NEXIV series.
5 Types of Optical Zoom System
5 types of optical zoom system are available to cover different field-of-view and resolution requirements.
High-Speed Height Measurement
Highly precise, high-speed height measurement is made possible by the accurate through-the-lens laser autofocus, which is capable of high-speed scanning at 1,000 points per second.
Ability to Measure Difficult Samples
Difficult edges and features can be easily measured using Nikon’s unique illumination options.
Non-Stop Automatic Measurement
Accurate measurement can be achieved despite variation in component positioning.
|XYZ Strokes||300x300x150 mm|
|Minimum Readout||0.01 μm|
|Maximum Sample Weight||30 kg (Accuracy Guaranteed: 10 kg)|
|Maximum Permissible Error |
(for samples under 20 kg)
|EUX,MPE EUY,MPE: 0.6+2L /1000 μm
EUXY,MPE: 0.9+3L /1000 μm
EUZ,MPE: 0.9+L /150 μm
|Accuracy Guaranteed Temperature||20 °C ± 0.5 K|
|Maximum Driving Speed XY, Z||100 mm/s, 50 mm/s|
|Minimum Driving Speed XY, Z||0.01 mm/s, 0.001 mm/s|
|Camera||VGA 1/3" B/W, Color *Color camera option is available only with Type 1, 2 and 3.|
|Working Distance||Type 1, 2, 3: 50 mm (10 mm when using 75 degree LED illumination) /
Type 4: 30 mm
Type TZ: 31 mm (low magnification), 11 mm (high magnification)
|Autofocus||Vision AF, Laser AF|
|Power Source||AC 100 - 240 V ± 10% 50/60 Hz|
|Power Consumption||5A - 2.5 A|
|Dimensions (WxDxH) and Weight||Main body with table: 1000 x 1125 x 1750 mm / approx. 500 kg
Controller: 190 x 450 x 440 mm / approx. 15 kg"
|Footprint (WxD)||3000×2800 mm|
|Type 1, 2, 3, and 4||Episcopic, diascopic, and 8-segment ring with 3 angles *All white LED/Type 4 has only 1 angle|
|Type TZ||Episcopic, diascopic, darkfield|
|Power Source||AC 100 - 240 V u00b1 10% 50/60 Hz|
|Power Consumption||5 A - 2.5 A|
|Zooming Head||Optical Magnification||FOV||Applications|
|Type 1||0.5X - 7.5X||9.33u00d77.01~0.622u00d70.467 mm||Molds, mechanical parts (household, automotive), PCB, electronic parts|
|Type 2|| 1X - 15X||4.67u00d73.5~0.311u00d70.233 mm|
|Type 3||2X - 30X||2.33u00d71.75~0.155u00d70.117 mm||Electronic parts|
|Type 4||4X - 60X||1.165u00d70.875~0.078u00d70.058 mm||High density package substrate (line, width, height)|
|Type TZ||1X - 120X||4.67u00d73.5~0.039u00d70.029 mm||Wafer pattern (WLP, bump height, rewiring mask, MEMS mask)|
5 types of Optical Zoom Systems. Type 1, 2, and 3 provide clear and low distortion image and high N. Type 4 and TZ are designed to cover high magnification, 5 types are available to choose from to cover different fields of view and resolution requirements.
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If you would like further details on this product or a more in-depth description, our expert team will provide you with additional information and, if required, arrange an on-site visit. Talk to us in detail about your project and our experts will advise you on the best inspection system to meet your requirements. Please fill out the form opposite and we will get in touch with you shortly.