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High Reliability, Efficiency and Operability
The NEXIV video measurement system, used extensively in the global semiconductor industry, has been integrated with Nikon’s proven NWL200 automatic wafer loading system.
The result is the VMZ-NWL200, an innovative measuring cell with excellent reliability and efficiency. In addition, specially developed software simplifies complex operations required for process control. High quality data is fed back faster to the production line, maximizing yield.
As it measures automatically and consistently, the VMZ-NWL200 eliminates variability of results due to different interpretations of readings by operators. In addition, Nikon leverages its strengths as an optical equipment manufacturer to provide a clear image to accurately detect the edges of the inspection object.
Inspection with a VMZ-NWL200 can be started with a single click. Furthermore, measurement productivity is three times that of measuring microscopes. High efficiency of the video measuring system provides low COO (Cost of Ownership).
Since wafer graphics are displayed on the GUI, the operator can specify the chip to be measured by simply clicking the point with a mouse.
|Device||Video Measuring System：NEXIV（VMZ-S3020 Type2, Type3, TypeTZ)|
|Wafer *1||size：6.8 inch（SEMI/JEIDA Standard)|
|Compatible carrier||6 inch：PA182-60MB-06XX（Entegris）|
|Throughput *2||6 min 45 sec|
|Minimum L/S||500 line/mm|
|Operating environment temperature||19～26℃|
|Operating environment humidity||Less than 70% RH|
|Dimensions||4125 x 3040 mm|
|Power source voltage||AC100-120V/200-240V|
|Power source frequency||50Hz/60Hz|
*1 Require wafer transfer evaluation before sales
*2 Transfer time for 25 wafers excluding measurement time
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