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Objective Lenses
CFI60-2 Objectives
CFI60-2 objectives are newly evolved from the established CFI60, with its high NA and long working distance. Employing Nikon’s unique phase Fresnel lens, CFI60-2 objectives have a long working distance and achieve highly corrected chromatic aberration for sharp, clear images.
| Type | Magnification | NA | W.D. (mm) | |
| Brightfield Type | T Plan EPI Plan (Semi-apochromat) *1 | 1x | 0.03 | 3.80 |
| 2.5X | 0.075 | 6.50 | ||
| TU Plan Fluor EPI Universal Plan Fluor (Semi-apochromat) | 5X | 0.15 | 23.50 | |
| 10X | 0.30 | 17.30 | ||
| 20X | 0.45 | 4.50 | ||
| 50X | 0.80 | 1.00 | ||
| 100X | 0.90 | 1.00 | ||
| TU Plan Apo EPI Universal Plan Apo (Apochromat) *2 | 50X | 0.80 | 2.00 | |
| 100X | 0.90 | 2.00 | ||
| 150X | 0.90 | 1.50 | ||
| Polarizing | TU Plan Fluor EPI Polarizing Universal Plan Fluor (Semi-apochromat) | 5X | 0.15 | 23.50 |
| 10X | 0.30 | 17.30 | ||
| 20X | 0.45 | 4.50 | ||
| 50X | 0.80 | 1.00 | ||
| 100X | 0.90 | 1.00 | ||
| Brightfield Long Working Distance | TU Plan EPI ELWD Long Working Distance Universal Plan (Semi-apochromat) *2 | 20X | 0.40 | 19.00 |
| 50X | 0.6 | 11.00 | ||
| 100X | 0.80 | 4.50 | ||
| Brightfield Super-long Working Distance | T Plan EPI SLWD Super-long Working Distance Plan (Semi-apochromat) *2 | 10X | 0.20 | 37.00 |
| 20X | 0.30 | 30.00 | ||
| 50X | 0.40 | 22.00 | ||
| 100X | 0.60 | 10.00 | ||
| Brightfield/ Darkfield Type | TU Plan Fluor BD Universal Plan Fluor (Semi-apochromat) | 5X | 0.15 | 18.00 |
| 10X | 0.30 | 15.00 | ||
| 20X | 0.45 | 4.50 | ||
| 50X | 0.80 | 1.00 | ||
| 100X | 0.90 | 1.00 | ||
| TU Plan Apo BD Universal Plan Apo (Apochromat) *2 | 50X | 0.80 | 2.00 | |
| 100X | 0.90 | 2.00 | ||
| 150X | 0.90 | 1.50 | ||
| Brightfield/Darkfield Long Working Distance Type | TU Plan BD ELWD Long Working Distance Universal Plan (Semi-apochromat) *2 | 20X | 0.40 | 19.00 |
| 50X | 0.60 | 11.00 | ||
| 100X | 0.80 | 4.50 |
*1 Phase Fresnel lens (diffraction optical element type) *2 A circular polarizing plate and depolarizer are built into T Plan EPI 1×/2.5× objectives. (The circular polarizing plate can be attached/detached.)
CFI60 Objectives
These objectives have been designed for the CFI60 system, Nikon’s proprietary optical system combining infinity optics with the superior performance of the CF optical system. The advantage of the parfocal distance of 60mm, a new standard, has been used to lengthen working distance while maintaining high NA, producing images that are crisp and clear with high contrast and high resolution.
| Type | Magnification | NA | W.D. (mm) | |
| Brightfield Type | CFI L Plan EPI (Achromat) | 2.5X | 0.075 | 8.80 |
| 40X | 0.65 | 1.00 | ||
| CFI LU Plan Apo EPI Deluxe-type objectives (Apochromat) | 150X | 0.95 | 0.30 | |
| CFI LE Plan EPI Economy-type objectives (Achromat) | 5X | 0.10 | 31.00 | |
| 10X | 0.25 | 13.00 | ||
| 20X | 0.4 | 3.6 | ||
| 50X | 0.75 | 0.5 | ||
| 100X | 0.9 | 0.31 | ||
| Brightfield With Correction Mechanism | CFI L Plan EPI CR For Inspecting LCDs Plan | 20X | 0.45 | 10.90 - 10.00 |
| 50X | 0.70 | 3.90 - 3.00 | ||
| 100X | 0.85 | 1.20 - 0.85 | ||
| 100X | 0.85 | 1.30 - 0.95 |
CF Infinity Corrected Objectives
The objectives support the CF infinity corrected optical system that combines field-proven CF optics with infinity correction to produce sharp, high resolution images with high contrast and minimal flare.
| Type | Magnification | NA | W.D. (mm) | |
| Brightfield Type | CF IC EPI E Plan Standard-type objectives (Achromat) | 10X | 0.25 | 12.50 |
| CF IC EPI Plan Standard-type objectives (Achromat) | 2.5X * | 0.075 | 8.80 | |
| 5X | 0.13 | 22.50 | ||
| 10X | 0.30 | 16.50 | ||
| 20X | 0.46 | 3.10 | ||
| 50X | 0.80 | 0.54 | ||
| 100X | 0.95 | 0.30 | ||
| CF IC EPI Plan ELWD Long working distance objectives | 20X | 0.40 | 11.00 | |
| 50X | 0.55 | 8.7 | ||
| 100X | 0.8 | 2.0 | ||
| CF IC EPI Plan SLWD Ultra-long working distance objectives | 10X | 0.21 | 20.30 | |
| 20X | 0.35 | 20.50 | ||
| 50X | 0.45 | 13.80 | ||
| 100X | 0.73 | 4.70 | ||
| CF IC EPI Plan ApoDeluxe-type objectives (Apochromat) | 50X | 0.95 | 0.35 | |
| 100X | 0.95 | 0.32 | ||
| 150X | 0.95 | 0.2 | ||
| Special-Use Type | CF IC EPI Plan DI For double-beam interferometry | 10XA | 0.30 | 7.40 |
| 20XA | 0.40 | 4.70 | ||
| 50XA | 0.55 | 3.40 | ||
| 100XA | 0.70 | 2.00 | ||
| CF IC EPI Plan TI For interferometry | 2.5XA | 0.075 | 10.30 | |
| 5XA | 0.13 | 9.30 |
*1 Use in combination with analyzers and polarizers. Some peripherals within the field of view cannot be covered.
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