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NEXIV VMZ-S Series – Difficult Edge Sensor
Nikon's NEXIV VMZ-S series of video measuring systems delivers high accuracy, speed and usability for inspection applications down to the micro level.
Speed and Accuracy where High Throughput is Critical.
The VMZ-S series provides three types of measuring envelope together with a range of high quality optics, complete with a TTL (through the lens) scanning laser as standard.
Capable of high-accuracy, high-speed measurement for fulfilling increasingly demanding inspection applications, the VMZ-S series is used in a wide range of industries.
Product Highlights
6 Types of Optical Zoom System
The system has been designed from the ground up, utilising specially designed Nikon optics to deliver high accuracy measurements.
High-Speed Height Measurement
Highly accurate, high-speed height measurement is made possible by accurate through-the-lens laser autofocus, capable of high-speed scanning at 1,000 points per second.
Ability to Measure Difficult Samples
Difficult edges and features can be easily measured due to Nikon’s unique illumination options.
Non-Stop Automatic Measurement
Accurate measurement can be achieved despite variation in component positioning.
Core Features
Designed to detect the surface of thin, transparent materials, the through-the-lens laser autofocus offers reliable measurement at high speed.
*Not available for Type A
Model | VMZ-S3020 | VMZ-S4540 | VMZ-S6555 |
XYZ Strokes | 300×200×200 mm *Type TZ with low magnification lens: 250×200×200 mm | 450x400x200 mm *Type TZ with low magnification lens: 400x400x200mm | 650x550x200 mm *Type TZ with low magnification lens: 600x550x200mm |
Minimum Readout | 0.01 μm | ||
Maximum Sample Weight | 20 kg (Accuracy guaranteed: 5 kg) | 40 kg (Accuracy guaranteed: 20 kg) | 50 kg (Accuracy guaranteed: 30 kg) |
Maximum Permissible Error (L: Length in mm) | EUX, MPE EUY, MPE 1.2 + 4L / 1000 µm EUXY, MPE 2.0 + 4L / 1000 µm EUZ, MPE1.2 + 5L / 1000 µm |
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Probing error 1),2): MPE PF2D 0.8 µm Probing error of the imaging probe 1),2): MPE PFV2D 0.3 µm |
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Camera | Black and White / Color 1/3 CMOS Camera | ||
Working Distance | Type 1,2 and 3: 50mm Type 4: 30mm Type TZ: (High-mag.) 11 mm / (Low-mag.) 32 mm Type A: 73.5 mm (63 mm with Laser AF) |
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Laser AF Repeatability Range 1),3) | 2σ ≦ 0.5 µm | ||
Illumination | Type 1, 2, 3, and 4 : Episcopic, diascopic, and 8-segment ring with 3 angles *All white LED/Type 4 has only 1 angle Type TZ: Left objective lens: Episcopic, darkfield ; Right objective lens: Episcopic, diascopic, darkfield Type A: Episcopic, diascopic, and 8-segment ring with 1 angle *All white LED |
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Power Source, Power Consumption | AC100 V-240 V, 50/60 Hz / 4 A − 2 A | ||
Dimensions & Weight | Main body with table (W×D×H): 700×730×1793 mm / approx. 265 kg Controller: 190×450×450 mm / approx. 12 kg | Main body with table (W×D×H): 1000×1340×1818 mm / approx. 510 kg Controller: 190×450×450 mm / approx. 12 kg | Main body with table (W×D×H): 1200×1640×1818 mm / approx. 740 kg Controller: 190×450×450 mm / approx. 12 kg |
Footprint (W×D) 4) | 2700×2400 mm | 3000×3000 mm | 3200×3300 mm |
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