Objective Lenses

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CFI60-2 Objectives

CFI60-2 objectives are newly evolved from the established CFI60, with its high NA and long working distance.

Employing Nikon’s unique phase Fresnel lens, CFI60-2 objectives have a long working distance and achieve highly corrected chromatic aberration for sharp, clear images.

TypeMagnificationNAW.D. (mm)
Brightfield TypeT Plan EPI Plan (Semi-apochromat) *11X0.033.80
2.5X 0.0756.50
TU Plan Fluor EPI
Universal Plan Fluor (Semi-apochromat)
5X0.1523.50
10X0.30 17.30
20X0.45 4.50
50X0.801.00
100X0.90 1.00
TU Plan Apo EPI
Universal Plan Apo (Apochromat) *2
50X0.802.00
100X0.902.00
150X0.901.50
PolarizingTU Plan Fluor EPI P
Polarizing Universal Plan Fluor
(Semi-apochromat)
5X0.1523.50
10X0.3017.30
20X0.454.50
50X0.801.00
100X0.901.00
Brightfield
Long Working Distance
TU Plan EPI ELWD
Long Working Distance Universal Plan
(Semi-apochromat) *2
20X0.40 19.00
50X0.611.00
100X0.804.50
Brightfield
Super-long Working Distance
T Plan EPI SLWD
Super-long Working Distance Plan
(Semi-apochromat) *2
10X0.2037.00
20X0.3030.00
50X0.4022.00
100X0.6010.00
Brightfield/
Darkfield Type
TU Plan Fluor BD
Universal Plan Fluor (Semi-apochromat)
5X0.1518.00
10X0.3015.00
20X0.454.50
50X0.801.00
100X0.901.00
TU Plan Apo BD
Universal Plan Apo (Apochromat) *2
50X0.802.00
100X0.902.00
150X0.901.50
Brightfield/Darkfield
Long Working Distance Type
TU Plan BD ELWD
Long Working Distance Universal Plan
(Semi-apochromat) *2
20X0.4019.00
50X0.6011.00
100X0.804.50

*1 Phase Fresnel lens (diffraction optical element type)
*2 A circular polarising plate and depolariser are built into T Plan EPI 1×/2.5× objectives. (The circular polarising plate can be attached/detached.)

CFI60 Objectives

These objectives have been designed for the CFI60 system, Nikon’s proprietary optical system combining infinity optics with the superior performance of the CF optical system. The advantage of the parfocal distance of 60mm, a new standard, has been utilised to lengthen working distance while maintaining high NA, producing images that are crisp and clear with high contrast and high resolution.

TypeMagnificationNAW.D. (mm)
Brightfield TypeCFI L Plan EPI (Achromat)2.5X0.0758.80
40X0.651.00
CFI LU Plan Apo EPI
Deluxe-type objectives (Apochromat)
150X0.95 0.30
CFI LE Plan EPI
Economy-type objectives (Achromat)
5X0.1031.00
10X0.2513.00
20X0.43.6
50X0.750.5
100X0.90.31
Brightfield
With Correction Mechanism
CFI L Plan EPI CR
For Inspecting LCDs Plan
20X 0.4510.90 - 10.00
50X0.703.90 - 3.00
100X0.851.20 - 0.85
100X0.851.30 - 0.95

CF Infinity Corrected Objectives

The objectives support the CF infinity corrected optical system that combines field-proven CF optics with infinity correction to produce sharp, high resolution images with high contrast and minimal flare.

TypeMagnificationNAW.D. (mm)
Brightfield TypeCF IC EPI E Plan
Standard-type objectives (Achromat)
10X0.2512.50
CF IC EPI Plan
Standard-type objectives (Achromat)
2.5X *0.0758.80
5X0.1322.50
10X0.3016.50
20X0.463.10
50X0.800.54
100X0.950.30
CF IC EPI Plan ELWD
Long working distance objectives
20X0.4011.00
50X0.558.7
100X0.82.0
CF IC EPI Plan SLWD
Ultra-long working distance objectives
10X0.2120.30
20X0.3520.50
50X0.4513.80
100X0.734.70
CF IC EPI Plan ApoDeluxe-type objectives (Apochromat)50X0.950.35
100X0.950.32
150X0.950.2
Special-Use TypeCF IC EPI Plan DI
For double-beam interferometry
10XA0.307.40
20XA0.404.70
50XA0.553.40
100XA0.702.00
CF IC EPI Plan TI
For interferometry
2.5XA0.07510.30
5XA0.139.30

*1 Use in combination with analysers and polarisers. Some peripherals within the field of view cannot be covered.

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