NEXIV VMZ-K Series

The NEXIV-K Series is capable of high-speed, high-resolution, 3D inspection.
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Ground-Breaking, Multi-Functional, Confocal Video Measuring System

This measuring system incorporates confocal technology, brightfield imaging with a 15X zoom and laser auto focus. No matter what geometrical measurements are needed, whether 2D or 3D, inspection and evaluation is exceptionally fast and accurate.

Confocal optics enable a clear display and facilitate accurate detection of high contrast edges.

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Product Highlights

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Fine Bump and Substrate Pattern

A combination of 2D measurement with a 15x zoom brightfield image and 3D height measurement in the same field of view enables diverse measurements.

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Probe Cards

Programming can be made from location data in one click. XYZ coordinates and coplanarity contact probe pins on probe cards can be automatically measured with unique image processing tools.

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Precise PCB Pattern

Nikon’s unique confocal imaging technology makes it possible to accurately scan both highly reflective and low reflectivity surfaces.

Core Features

VMZ-K Series

Objective Lens
Standard HeadHigh-magnification Head
Magnification 1.5x3x7.5x15x30x
W.D. 24mm24mm5mm20mm5mm
Confocal Optics (Area Height Measure)
Standard Head High-magnification Head
Field of View8 x 6mm
4 x 3mm1.6 x 1.2mm0.8 x 0.6mm0.4 x 0.3mm
Height Measurement Repeatability (2σ)0.6µm
0.35µm 0.25µm 0.20µm
Height Measurement Resolution0.01µm
Brightfield Optics (2D Measurement)
Standard HeadHigh-magnification Head
Zooming MethodMotorized 5-step zoom
Field of View 8 x 6mm to
0.53 x 0.4mm
4 x 3mm to
0.27 x 0.2mm
1.6 x 1.2mm to
0.11 x 0.08mm
1.26 x 0.95mm to
0.1 x 0.074mm
0.63 x 0.47mm to
0.05 x 0.04mm
IlluminationWhite LED diascopic and episcopic illuminator for all types,
White LED ring light for type 1.5x, 3x and 7.5x
Light source
White LED
Auto FocusVision AF and TTL laser AF (Scan Mode available)
Main Body
VMZ-K3040VMZ-K6555
Stroke (X, Y, Z)300 x 400 x 150mm
Guaranteed Loading Capacity 20kg30kg
Maximum Permissible ErrorEUX,MPE EUY, MPE 1.5 + 4L/1000µm
EUXY, MPE 2.5 + 4L/1000µm
EUZ, MPE 1 + L/1000µm
Power Source / Power Consumption AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A
Footprint2500 x 1600mm2500 x 1900mm
VMZ-K3040
VMZ-K6555

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