NEXIV VMZ-S Series

Nikon's NEXIV VMZ-S series of video measuring systems delivers high accuracy, speed and usability for inspection applications down to the micro level.
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Speed and Accuracy where High Throughput is Critical.

The VMZ-S series provides three types of measuring envelope together with a range of high quality optics, complete with a TTL (through the lens) scanning laser as standard.

Capable of high-accuracy, high-speed measurement for fulfilling increasingly demanding inspection applications, the VMZ-S series is used in a wide range of industries.

Product Highlights

VMZStype2head

6 Types of Optical Zoom System

The system has been designed from the ground up, utilising specially designed Nikon optics to deliver high accuracy measurements.

TTL_laser

High-Speed Height Measurement

Highly accurate, high-speed height measurement is made possible by accurate through-the-lens laser autofocus, capable of high-speed scanning at 1,000 points per second.

Ability to Measure Difficult Samples

Difficult edges and features can be easily measured due to Nikon’s unique illumination options.

Non-Stop Automatic Measurement

Accurate measurement can be achieved despite variation in component positioning.

Core Features

VMZ-S Series

Remote Control SDK

ModelVMZ-S3020VMZ-S4540VMZ-S6555
XYZ Strokes 300×200×200 mm *Type TZ with low magnification lens: 250×200×200 mm450x400x200 mm *Type TZ with low magnification lens: 400x400x200mm650x550x200 mm *Type TZ with low magnification lens: 600x550x200mm
Minimum Readout0.01 μm
Maximum Sample Weight20 kg (Accuracy guaranteed: 5 kg)40 kg (Accuracy guaranteed: 20 kg)50 kg (Accuracy guaranteed: 30 kg)
Maximum Permissible Error (L: Length in mm)EUX, MPE EUY, MPE 1.2 + 4L / 1000 µm
EUXY, MPE 2.0 + 4L / 1000 µm
EUZ, MPE1.2 + 5L / 1000 µm
Probing error 1),2): MPE PF2D 0.8 µm
Probing error of the imaging probe 1),2): MPE PFV2D 0.3 µm
CameraBlack and White / Color 1/3 CMOS Camera
Working Distance Type 1,2 and 3: 50mm
Type 4: 30mm
Type TZ: (High-mag.) 11 mm / (Low-mag.) 32 mm
Type A: 73.5 mm (63 mm with Laser AF)
Laser AF Repeatability Range 1),3)2σ ≦ 0.5 µm
IlluminationType 1, 2, 3, and 4 : Episcopic, diascopic, and 8-segment ring with 3 angles *All white LED/Type 4 has only 1 angle
Type TZ: Left objective lens: Episcopic, darkfield ; Right objective lens: Episcopic, diascopic, darkfield
Type A: Episcopic, diascopic, and 8-segment ring with 1 angle *All white LED
Power Source,
Power Consumption
AC100 V-240 V, 50/60 Hz / 4 A − 2 A
Dimensions & WeightMain body with table (W×D×H): 700×730×1793 mm / approx. 265 kg Controller: 190×450×450 mm / approx. 12 kgMain body with table (W×D×H): 1000×1340×1818 mm / approx. 510 kg Controller: 190×450×450 mm / approx. 12 kgMain body with table (W×D×H): 1200×1640×1818 mm / approx. 740 kg Controller: 190×450×450 mm / approx. 12 kg
Footprint (W×D) 4)2700×2400 mm
3000×3000 mm
3200×3300 mm
VMZ-S3020 Dimensions in mm
VMZ-S3020 Dimensions in mm
VMZ-S4540 Dimensions in mm
VMZ-S4540 Dimensions in mm
VMZ-S6555 Dimensions in mm
VMZ-S6555 Dimensions in mm

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