A series of flexible, modular, upright microscopes for various episcopic optical contrast techniques (BF-DF-DIC-POL-Fluorescence-Interferometry). Together with digital imaging accessories and large stage X-Y travels, the instruments are ideal for semiconductor and material inspection activities.

Modular, Motorised and Manual Upright Microscopes

Superb Nikon CFI60-2 optics provide excellent images to both eyepieces and to Nikon’s digital imaging cameras with analysis software. Thanks to the modular design, the universal microscope allows complementary optical contrast techniques on one microscope stand.

Nikon ECLIPSE LV150NA and LV150N

These microscopes with episcopic illumination are for inspection of semiconductors, industrial materials and components. They are also suited to research and development applications.

Nikon CFI60-2 Optical Series

Nikon’s innovative design enables clear imaging techniques, including high-contrast, brightfield, darkfield, polarisation (POL), interference contrast (DIC) and double beam interferometry optical contrast.

Nikon Digital Sight Cameras

The full range of Nikon’s Digital Sight cameras can capture images of a sample and deliver them to the image processing software of the NIS-Elements suite, together with microscope data on the objective lens, magnification setting and light intensity when using the LV-ECON E controller.

Integration of LV150N and Wafer Loader NWL200

Nikon’s wafer loaders are well accepted and trusted across the semiconductor industry and many installations are in use today.

Product Highlights

Universal Optical Contrast Methods

Reflected light: brightfield, darkfield, polarising (POL), differential interference contrast (DIC), epi-fluorescence and two-beam interferometry.

Modular Component Accessories

From lamphouse to eyepiece, components are selected to match a user’s application. They include stands, stages, objectives, nosepieces, optical heads, eyepieces, digital cameras, filters and contrast technique accessories.

Intelligent Digital Communication

By means of an LV-ECON E controller, LV150NA and LV150N microscopes can detect and control the objective lens, light intensity, aperture and epi-contrast via Nikon’s NIS-Elements software. The LV150N detects and reports on the objective lens using the LV-NU5I and LV-INAD.

Ergonomic Design

Optimal positioning of operator controls and a variable angle eye-tube allow fatigue-free work. The right-way-up, right-way-around image enables raw materials, semiconductors and industrial components to be correctly observed.

Core Features

Materials and Semiconductor Substrate Inspections

Example applications include inspection of semiconductor substrates and device packaging, flat panel displays (FPD), electronic components and innovative materials using dedicated episcopic contrast techniques.

Upright Microscopes LV-N Series

Digital Sight Series

NIS Elements

NWL200 Wafer Loader Series

Base Unit:Maximum sample height: 38 mm (when used with LVNU5A U5A nosepiece and LV-S32 3x2 stage / LV-S64 6x4 stage)
*73 mm when used with one column riser
12V50W internal power source for dimmer, coarse and fine adjustment knobs
Left: coarse and fine adjustment / Right: fine adjustment, 40 mm stroke
Coarse adjustment: 14 mm/turn (with torque adjustment, refocusing mechanism) Fine adjustment: 0.1 mm/turn (1 μm/graduation)
Stage mounting hole intervals: 70 x 94 (fixed by 4-M4 screw)
Nosepieces:C-N6 ESD Sextuple Nosepiece ESD
LV-NU5 Universal Quintuple Nosepiece ESD
LV-NBD5 BD Quintuple Nosepiece ESD
LV-NU5I Intelligent Universal Quintuple Nosepiece ESD
LV-NU5A Motorized Universal Quintuple Nosepiece ESD
LV-NU5AC Motorized Universal Quintuple Nosepiece ESD
Episcopic Illuminator:LV-UEPI-N
LV-LH50PC 12V50W Precentered Lamphouse, LV-LL LED Lamphouse
Bright/darkfield switch and linked aperture stop (centerable), field diaphragm (centerable)
Accepts ø 25 mm filter (NCB11, ND16, ND4), polarizer/analyzer, λ plate, excitation light balancer; equipped with noise terminator

LV-LH50PC 12V50W Precentered Lamphouse, LV-LL LED Lamphouse
HG precentered fiber illuminator: C-HGFIE (with light adjustment) *option
Fluorescence LED Light Source D-LEDI (with light adjustment (PC controllable) *LV150N only)
Bright/darkfield switch and linked aperture stop (centerable), field diaphragm (centerable),
automated optical element switching feature matched to brightfield, darkfield, and epi-fluorescence switch
Accepts ø 25 mm filter (NCB11, ND16, ND4), polarizer/analyzer, λ plate, excitation light balancer; equipped with noise terminator
Eyepiece Tubes:LV-TI3 trinocular eyepiece tube ESD (Erected image, FOV: 22/25)
LV-TT2 TT2 tilting trinocular eyepiece tube (Erected image, FOV: 22/25)
C-TB binocular tube (Inverted image, FOV: 22)
P-TB Binocular Tube (Inverted image, FOV: 22)
P-TT2 Trinocular Tube (Inverted image, FOV: 22)
Stages:LV-S32 3x2 stage (Stroke: 75 x 50 mm with glass plate) ESD compatible
LV-S64 6x4 stage (Stroke: 150 x 100 mm with glass plate) ESD compatible
LV-S6 6x6 stage (Stroke: 150 x 150 mm) ESD compatible
Eyepieces:CFI eyepiece series
Objective lenses:Industrial Microscope CFI60-2/CFI60 optical system Objective lens series: Combinations in accordance with the observation method
ESD performance:1000 to 10V, within 0.2 sec. (excluding certain accessories)
Power consumption:
Weight:Approx. 8.6 kgApprox. 8.7 kg
LV150N, LV150NA

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