Objective Lenses

CFI60-2 Objectives

Employing Nikon’s unique phase Fresnel lens, CFI60-2 objectives have a long working distance and achieve highly corrected chromatic aberration for sharp, clear images.

Objective LensMagnificationNAWD (mm)
BrightfieldT Plan EPI (Semi-apochromat) *11X0.033.8
2.5X 0.086.5
TU Plan Fluor EPI (Semi-apochromat)5X0.1523.5
10X0.30 17.3
20X0.45 4.5
50X0.801.0
100X0.90 1.0
TU Plan Apo EPI (Apochromat) *250X0.802.0
100X0.902.0
150X0.901.5
PolarizingTU Plan Fluor EPI P
Polarizing (Semi-apochromat)
5X0.1523.5
10X0.3017.3
20X0.454.5
50X0.801.0
100X0.901.0
Brightfield
Long Working Distance
TU Plan EPI ELWD (Semi-apochromat) *220X0.40 19.0
50X0.6011.0
100X0.804.5
Brightfield
Super-long Working Distance
T Plan EPI SLWD (Semi-apochromat) *210X0.2037.0
20X0.3030.0
50X0.4022.0
100X0.6010.0
Brightfield/DarkfieldTU Plan Fluor BD (Semi-apochromat)5X0.1518.0
10X0.3015.0
20X0.454.5
50X0.801.0
100X0.901.0
TU Plan Apo BD
Universal Plan Apo (Apochromat) *2
50X0.802.0
100X0.902.0
150X0.901.5
Brightfield/Darkfield
Long Working Distance Type
TU Plan BD ELWD (Semi-apochromat) *220X0.4019.0
50X0.6011.0
100X0.804.5

*1 A circular polarising plate and depolariser are built into T Plan EPI 1×/2.5× objectives. (The circular polarising plate can be attached/detached.)
*2 Phase Fresnel lens (diffraction optical element type)

CFI60 Objectives

These objectives have been designed for the CFI60 system, Nikon’s proprietary optical system combining infinity optics with the superior performance of the CF optical system. The advantage of the parfocal distance of 60mm, a new standard, has been utilised to lengthen working distance while maintaining high NA, producing images that are crisp and clear with high contrast and high resolution.

Objective LensMagnificationNAWD (mm)
BrightfieldL Plan EPI (Achromat)40X0.651.00
LE Plan EPI (Achromat)5X0.1031.00
10X0.2513.00
20X0.403.60
50X0.750.50
100X0.900.31
Brightfield
With Correction Mechanism
L Plan EPI CR
For Inspecting LCDs Plan
20X 0.4510.90 - 10.00
50X0.703.90 - 3.00
100X0.851.20 - 0.85
100X0.851.30 - 0.95

CF Infinity Corrected Objectives

The objectives support the CF infinity corrected optical system that combines field-proven CF optics with infinity correction to produce sharp, high resolution images with high contrast and minimal flare.

Objective LensMagnificationNAWD (mm)
BrightfieldCF IC EPI Plan (Achromat)2.5XA0.088.80
5XA0.1322.50
10XA0.3016.50
20XA0.463.10
50XA0.800.54
100XA0.950.30
CF IC EPI Plan ELWD
Long working distance
20X0.4011.00
50X0.558.70
100X0.802.00
CF IC EPI Plan SLWD
Ultra-long working distance
10X0.2120.30
20X0.3520.50
50X0.4513.80
100X0.734.70
CF IC EPI Plan Apo
High-Resolution (Apochromat)
50XA0.950.35
100XA0.950.32
150XB0.950.20
Double Beam InterferenceCF IC EPI Plan DI10XA0.307.40
20XA0.404.70
50XA0.553.40
100XA0.702.00
Interference ObjectivesCF IC EPI Plan TI2.5XA0.0810.30
5XA0.139.30

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