iNEXIV VMA Series – Optical & Tactile Coordinate Measuring System

With a large field of view, a long working distance and large XYZ strokes, the iNEXIV VMA series offers the ultimate in usability for automatic measurement of 3D components.

Various Measuring Applications with a Wide FOV

The iNEXIV VMA series provides three types of measurement envelope together with wide field of view optics. These touch probe-ready systems are ideal for a wide variety of industrial measurement, inspection and quality control applications using both vision and tactile measurement.

The VMA series is optimised for speed and ease-of-use as well as repeatable, accurate measurement of a variety of different components.


Product Highlights


Long Working Distance

The iNEXIV VMA has a long working distance of 73.5mm. It is well suited to depth measurements where the height variation is large, such as on high bosses and in fine, deep holes.

Tactile Measurement (option)

The iNEXIV VMA is able to measure the dimensions and angles of non-visible features, such as holes on the side of a component.

Core Features

VMA Series

Remote Control SDK

Stroke (X x Y x Z)250 x 200 x 200 mm450 x 400 x 200 mm650 x 550 x 200 mm
Measurement Range with TP (Touch Probe) 200 x 200 x 166 mm (TP20)
200 x 200 x 170 mm (TP200)
250 x 200 x 200 mm (with Vision AF)
400 x 400 x 166 mm (TP20)
400 x 400 x 170 mm (TP200)
450 x 400 x 200 mm (with Vision AF)
600 x 550 x 166 mm (TP20)
600 x 550 x 170 mm (TP200)
650 x 550 x 200 mm (with Vision AF)
Measurement Range with TP & MCR20 *1175 x 200 x 166 mm (TP20)
175 x 200 x 170 mm (TP200)
225 x 200 x 200 mm (with Vision AF)
325 x 400 x 166 mm (TP20)
325 x 400 x 170 mm (TP200)
375 x 400 x 200 mm (with Vision AF)
525 x 550 x 166 mm (TP20)
525 x 550 x 170 mm (TP200)
575 x 550 x 200 mm (with Vision AF)
Minimum Readout0.1 µm
Maximum Sample Weight (Accuracy Guaranteed)15 kg (5 kg)40 kg (20 kg)50 kg (30 kg)
Maximum Permissable Error *2
(L = Length in mm)
EUX,MPE EUY,MPE: 2+8L/1000 µm
EUXY,MPE: 3+8L/1000μm
EUZ,MPE: 3+L/50μm *3
EUX,MPE EUY,MPE: 2+6L/1000 µm
EUXY,MPE: 3+6L/1000μm
EUZ,MPE: 3+L/100μm *3
CameraBlack & White 1/3" CCD, Color 1/3" (option)
Working Distance
73.5 mm (63 mm with Laser AF)
MagnificationOptical: 0.35 to 3.5x (0.52x to 5.2x high magnification is available as an option)
On screen: 12.6 to 126x with 24-inch WUXGA (1920 x 1200 pixels) monitor
FOV size on stage13.3 x 10 mm to 1.33 x 1 mm (8.9 x 6.7 mm to 0.89 x 0.67 mm with high-magnification option)
Auto Focus Vision AF, Laser AF (option)
IlluminationContour Illumination and Surface Illumination: White LED diascopic illumination
Oblique Illumination: 8-segment white LED ring
Video Resolution640 x 480 pixels
Touch Probe (optional)Renishaw® TP200/TP20
Power Source
100 V - 240 V, 50/60 Hz
Power Consumption5 A (100V) -2.5 A (240 V)
(excluding power consumption of host computer and its peripherals)
5 A (100V) -2.5 A (240 V)
Main body (W x D x H)650 x 700 x 1557 mm 110 kg1000 x 1340 x 1553 mm 500 kg1200 x 1640 x 1553 mm 665 kg
Controller145 x 400 x 390 mm 14 kg145 x 400 x 390 mm 14 kg145 x 400 x 390 mm 14 kg
Operational environmentTemperature: 10 to 35ºC
Humidity: 70% or less
Accuracy guaranteed temperature20°C ±0.5K

*1: The iNEXIV-dedicated MCR20 can be used for both TP20 and TP200
*2: Nikon’s in-house test at 20°C ±0.5k
*3: With TP or Laser AF


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