NEXIV VMZ-S Series – Difficult Edge Sensor

Nikon's NEXIV VMZ-S series of video measuring systems delivers high accuracy, speed and usability for inspection applications down to the micro level.

Speed and Accuracy where High Throughput is Critical.

The VMZ-S series provides three types of measuring envelope together with a range of high quality optics, complete with a TTL (through the lens) scanning laser as standard.

Capable of high-accuracy, high-speed measurement for fulfilling increasingly demanding inspection applications, the VMZ-S series is used in a wide range of industries.

Product Highlights


6 Types of Optical Zoom System

The system has been designed from the ground up, utilising specially designed Nikon optics to deliver high accuracy measurements.


High-Speed Height Measurement

Highly accurate, high-speed height measurement is made possible by accurate through-the-lens laser autofocus, capable of high-speed scanning at 1,000 points per second.

Ability to Measure Difficult Samples

Difficult edges and features can be easily measured due to Nikon’s unique illumination options.

Non-Stop Automatic Measurement

Accurate measurement can be achieved despite variation in component positioning.

Core Features

VMZ-S Series

Remote Control SDK

XYZ Strokes 300×200×200 mm *Type TZ with low magnification lens: 250×200×200 mm450x400x200 mm *Type TZ with low magnification lens: 400x400x200mm650x550x200 mm *Type TZ with low magnification lens: 600x550x200mm
Minimum Readout0.01 μm
Maximum Sample Weight20 kg (Accuracy guaranteed: 5 kg)40 kg (Accuracy guaranteed: 20 kg)50 kg (Accuracy guaranteed: 30 kg)
Maximum Permissible Error (L: Length in mm)EUX, MPE EUY, MPE 1.2 + 4L / 1000 µm
EUXY, MPE 2.0 + 4L / 1000 µm
EUZ, MPE1.2 + 5L / 1000 µm
Probing error 1),2): MPE PF2D 0.8 µm
Probing error of the imaging probe 1),2): MPE PFV2D 0.3 µm
CameraBlack and White / Color 1/3 CMOS Camera
Working Distance Type 1,2 and 3: 50mm
Type 4: 30mm
Type TZ: (High-mag.) 11 mm / (Low-mag.) 32 mm
Type A: 73.5 mm (63 mm with Laser AF)
Laser AF Repeatability Range 1),3)2σ ≦ 0.5 µm
IlluminationType 1, 2, 3, and 4 : Episcopic, diascopic, and 8-segment ring with 3 angles *All white LED/Type 4 has only 1 angle
Type TZ: Left objective lens: Episcopic, darkfield ; Right objective lens: Episcopic, diascopic, darkfield
Type A: Episcopic, diascopic, and 8-segment ring with 1 angle *All white LED
Power Source,
Power Consumption
AC100 V-240 V, 50/60 Hz / 4 A − 2 A
Dimensions & WeightMain body with table (W×D×H): 700×730×1793 mm / approx. 265 kg Controller: 190×450×450 mm / approx. 12 kgMain body with table (W×D×H): 1000×1340×1818 mm / approx. 510 kg Controller: 190×450×450 mm / approx. 12 kgMain body with table (W×D×H): 1200×1640×1818 mm / approx. 740 kg Controller: 190×450×450 mm / approx. 12 kg
Footprint (W×D) 4)2700×2400 mm
3000×3000 mm
3200×3300 mm
VMZ-S3020 Dimensions in mm
VMZ-S3020 Dimensions in mm
VMZ-S4540 Dimensions in mm
VMZ-S4540 Dimensions in mm
VMZ-S6555 Dimensions in mm
VMZ-S6555 Dimensions in mm

Related Products

NEXIV AutoMeasure v14

Nikon's NEXIV AutoMeasure v14 delivers efficiency and customisability through optimised program creation, enabling a streamlined workflow and accelerating productivity.
Discover the Product

Speak To Us About This Product

If you would like further details on this product or a more in-depth description, our expert team will provide you with additional information and, if required, arrange an on-site visit.

Talk to us in detail about your project and our experts will advise you on the best inspection system to meet your requirements.

Please fill out the form opposite and we will get in touch with you shortly.