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NEXIV VMZ-S Series
Speed and Accuracy where High Throughput is Critical.
The VMZ-S series provides three types of measuring envelope together with a range of high quality optics, complete with a TTL (through the lens) scanning laser as standard.
Capable of high-accuracy, high-speed measurement for fulfilling increasingly demanding inspection applications, the VMZ-S series is used in a wide range of industries.
6 Types of Optical Zoom System
The system has been designed from the ground up, utilising specially designed Nikon optics to deliver high accuracy measurements.
High-Speed Height Measurement
Highly accurate, high-speed height measurement is made possible by accurate through-the-lens laser autofocus, capable of high-speed scanning at 1,000 points per second.
Ability to Measure Difficult Samples
Difficult edges and features can be easily measured due to Nikon’s unique illumination options.
Non-Stop Automatic Measurement
Accurate measurement can be achieved despite variation in component positioning.
|XYZ Strokes||300×200×200 mm *Type TZ with low magnification lens: 250×200×200 mm||450x400x200 mm *Type TZ with low magnification lens: 400x400x200mm||650x550x200 mm *Type TZ with low magnification lens: 600x550x200mm|
|Minimum Readout||0.01 μm|
|Maximum Sample Weight||20 kg (Accuracy guaranteed: 5 kg)||40 kg (Accuracy guaranteed: 20 kg)||50 kg (Accuracy guaranteed: 30 kg)|
|Maximum Permissible Error (L: Length in mm)||EUX, MPE EUY, MPE 1.2 + 4L / 1000 µm
EUXY, MPE 2.0 + 4L / 1000 µm
EUZ, MPE1.2 + 5L / 1000 µm
|Probing error 1),2): MPE PF2D 0.8 µm
Probing error of the imaging probe 1),2): MPE PFV2D 0.3 µm
|Camera||Black and White / Color 1/3 CMOS Camera|
|Working Distance||Type 1,2 and 3: 50mm
Type 4: 30mm
Type TZ: (High-mag.) 11 mm / (Low-mag.) 32 mm
Type A: 73.5 mm (63 mm with Laser AF)
|Laser AF Repeatability Range 1),3)||2σ ≦ 0.5 µm|
|Illumination||Type 1, 2, 3, and 4 : Episcopic, diascopic, and 8-segment ring with 3 angles *All white LED/Type 4 has only 1 angle
Type TZ: Left objective lens: Episcopic, darkﬁeld ; Right objective lens: Episcopic, diascopic, darkﬁeld
Type A: Episcopic, diascopic, and 8-segment ring with 1 angle *All white LED
|AC100 V-240 V, 50/60 Hz / 4 A − 2 A|
|Dimensions & Weight||Main body with table (W×D×H): 700×730×1793 mm / approx. 265 kg Controller: 190×450×450 mm / approx. 12 kg||Main body with table (W×D×H): 1000×1340×1818 mm / approx. 510 kg Controller: 190×450×450 mm / approx. 12 kg||Main body with table (W×D×H): 1200×1640×1818 mm / approx. 740 kg Controller: 190×450×450 mm / approx. 12 kg|
|Footprint (W×D) 4)||2700×2400 mm||3000×3000 mm ||3200×3300 mm|
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