These microscopes are for exceptionally precise optical inspection of wafers (200mm for L200N series and 300mm for L300N series), reticules and other substrates.
Reflected light: brightfield, darkfield, polarising (POL), differential interference contrast (DIC), epi-fluorescence and two-beam interferometry.
Transmitted light: brightfield, darkfield, polarising, differential interference contrast and phase contrast.
Optimal positioning of operator controls with variable angle eye-tube allows fatigue-free work.
A right-way-up, right-way-around image is provided for correctly observing raw materials, semiconductors and industrial components.
Used together with Digital Sight cameras for microscopes, high-definition images can be efficiently captured. Images can be processed using the NIS-Elements software to conduct measurement and analysis.
The microscope detects and controls the objective lens in use, light intensity, episcopic illumination and aperture via a USB connection to Nikon’s NIS-Elements software.
Nikon’s innovative design enables clear imaging techniques, including high-contrast, brightfield, darkfield, polarization (POL), differential interference contrast (DIC) and double beam interferometry optical contrast.
Integrating with the NWL200 wafer loader, the L200N can meet wafer inspection needs such as micro inspections.
Applications are centred around inspection duties in the electronics and telecommunications sectors.
Antennae waveguides are measured with utmost precision, as well as other components such as wafers for semiconductor or photovoltaic devices and micro electro mechanical systems (MEMS) used in smartphones, gyroscopes and accelerometers, for example.
| L300N | L200N | L300ND | L200ND | ||
| Illumination type | Episcopic | Episcopic/Diascopic | |||
| Main body | Power sources for motorized control built-in Motorized control for nosepiece, Light intensity control, Aperture diaphragm control, Episcopic/Diascopic change-over (L300ND/L200ND only) |
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| Nosepiece | General | Motorized universal sextuple nosepiece | |||
| Centering Function | Yes | - | Yes | - | |
| EPI/DIA changeover | - | - | Yes | Yes | |
| Focusing mechanism | Cross travel | 29 mm | |||
| Coarse | 12.7 mm per rotation (torque adjustable, refocusing mechanism provided) | ||||
| Fine | 0.1 mm per rotation (in 1 μm increments) | ||||
| Episcopic illuminator | 12V-50W halogen lamp light source built in, LV-LL LED Lamphouse Observation methods: Brightfield, Darkfield, Simple polarizing, DIC, Epi-fluorescence (L300N/L300ND/L200ND only) |
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| Diascopic illuminator | - | 12V-50W halogen lamp light source built-in LV-LL LED Lamphouse |
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| Interface | USB x 1, RS232C (for Intensilight) x 1 | ||||
| Eyepiece tubes | L2-TTA tilting trinocular tube (tilt angle: 0-30 °) L2-TT4A tilting trinocular tube (tilt angle: 0-30 °) with centering and focus adjustment mechanism LV-TI3 trinocular tube (erected image) |
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| Stages | L3-S12 14 x 12 stage | L2-S8A 8 x 8 stage | L3-S12 14 x 12 stage | L2-S8A 8 x 8 stage | |
| LV-SHA stage handle adapter attachable to all stages | |||||
| Eyepieces | CFI eyepiece lens series | ||||
| Objective lenses | CFI60-2 / CFI60 objective lens series | ||||
| Antistatic mechanism | 1000-10 V, within 0.2 sec | ||||
| Power consumption | 1.2 A / 90 W | ||||
| Weight (approx.) | Body Only | 38 kg | 31 kg | 40 kg | 31 kg |
If you would like further details on this product or a more in-depth description, our expert team will provide you with additional information and, if required, arrange an on-site visit.
Talk to us in detail about your project and our experts will advise you on the best inspection system to meet your requirements.
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